Invention Grant
US07436054B2 MEMS microphone with a stacked PCB package and method of producing the same
有权
具有堆叠PCB封装的MEMS麦克风及其制造方法
- Patent Title: MEMS microphone with a stacked PCB package and method of producing the same
- Patent Title (中): 具有堆叠PCB封装的MEMS麦克风及其制造方法
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Application No.: US11368172Application Date: 2006-03-03
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Publication No.: US07436054B2Publication Date: 2008-10-14
- Inventor: Wang Zhe
- Applicant: Wang Zhe
- Applicant Address: SG Singapore
- Assignee: Silicon Matrix, Pte. Ltd.
- Current Assignee: Silicon Matrix, Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Saile Ackerman LLC
- Agent Stephen B. Ackerman; Rosemary L. S. Pike
- Main IPC: H01L23/02
- IPC: H01L23/02

Abstract:
A MEMS microphone with a stacked PCB package is described. The MEMS package has at least one MEMS acoustic sensor device located on a PCB stack. A metal cap structure surrounds the at least one MEMS acoustic sensor device wherein an edge surface of the metal cap structure is attached and electrically connected to the PCB stack. In a first embodiment, a back chamber is formed underlying the at least one MEMS acoustic sensor device and within the PCB stack wherein an opening underlying the at least one MEMS acoustic sensor device accesses the back chamber. An opening in the metal cap structure not aligned with the at least one MEMS acoustic sensor device allows external fluid, acoustic energy or pressure to enter the at least one MEMS acoustic sensor device. In a second embodiment, a back chamber is formed in the space under the metal cap and over the first PCB. A hollow chamber is formed between the first PCB and the second PCB wherein an opening under the at least one MEMS acoustic sensor device accesses the hollow chamber. An opening in a bottom surface of the PCB stack not aligned with the at least one MEMS acoustic sensor device also accesses the hollow chamber and allows external fluid, acoustic energy or pressure to enter the at least one MEMS acoustic sensor device.
Public/Granted literature
- US20070205492A1 MEMS microphone with a stacked PCB package and method of producing the same Public/Granted day:2007-09-06
Information query
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