发明授权
- 专利标题: System and method for improving equipment communication in semiconductor manufacturing equipment
- 专利标题(中): 改进半导体制造设备设备通信的系统和方法
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申请号: US10851592申请日: 2004-05-20
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公开(公告)号: US07437404B2公开(公告)日: 2008-10-14
- 发明人: Hsueh Chi Shen
- 申请人: Hsueh Chi Shen
- 申请人地址: TW Hsin-Chu
- 专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Company, Ltd.
- 当前专利权人地址: TW Hsin-Chu
- 代理机构: Haynes Boone, LLP
- 主分类号: G06F15/16
- IPC分类号: G06F15/16
摘要:
Provided is a system and method for connecting semiconductor manufacturing equipment to a host and one or more clients. In one example, the system includes an application queue, a host queue, and an equipment queue configured to hold messages received from and sent to an application agent, a host agent, and an equipment agent, respectively. A management information base may be configured to store information identifying a first virtual channel linking the client with the manufacturing equipment via the application queue and the equipment queue, and a second virtual channel linking the host with the manufacturing equipment via the host queue and the equipment queue. A dispatcher may be configured to use information from the management information base to route messages between the client and the manufacturing equipment via the first virtual channel and to route messages between the host and the manufacturing equipment via the second virtual channel.
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