发明授权
- 专利标题: Fabricating method of a flash memory cell
- 专利标题(中): 闪存单元的制造方法
-
申请号: US11461778申请日: 2006-08-02
-
公开(公告)号: US07445999B2公开(公告)日: 2008-11-04
- 发明人: Leo Wang , Cheng-Tung Huang , Saysamone Pittikoun
- 申请人: Leo Wang , Cheng-Tung Huang , Saysamone Pittikoun
- 申请人地址: TW Hsinchu
- 专利权人: Powerchip Semiconductor Corp.
- 当前专利权人: Powerchip Semiconductor Corp.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Jianq Chyun IP Office
- 优先权: TW93120432A 20040708
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A flash memory cell including a first conductive type substrate, a second conductive type well, a patterned film layer, a second conductive type doped region, a tunneling dielectric layer, a plurality of floating gates, an inter-gate dielectric layer and a plurality of control gates is provided. The floating gates are formed on the first conductive type substrate outside the patterned film layer. The floating gates have a thickness greater than the patterned film layer. Thus, the overlapping area between the floating gates and the control gates and hence the coupling ratio of the flash memory cell is increased.
公开/授权文献
- US20060263978A1 FABRICATING METHOD OF A FLASH MEMORY CELL 公开/授权日:2006-11-23
信息查询
IPC分类: