Invention Grant
- Patent Title: MEMS switch and manufacturing method thereof
- Patent Title (中): MEMS开关及其制造方法
-
Application No.: US11429364Application Date: 2006-05-08
-
Publication No.: US07446634B2Publication Date: 2008-11-04
- Inventor: Hee-moon Jeong , Sang-wook Kwon , Che-heung Kim , Jong-seok Kim , Jun-o Kim , Young-tack Hong , In-sang Song , Sang-hun Lee
- Applicant: Hee-moon Jeong , Sang-wook Kwon , Che-heung Kim , Jong-seok Kim , Jun-o Kim , Young-tack Hong , In-sang Song , Sang-hun Lee
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Sughrue Mion, PLLC
- Priority: KR10-2005-0067333 20050725
- Main IPC: H01H51/22
- IPC: H01H51/22

Abstract:
A MEMS switch including a substrate at least one fixed electrode formed on top of the substrate and at least one restoring electrode formed on top of the substrate and formed at a lateral surface of the fixed electrode. At least one signal line is formed on top of the substrate and has a switching contact part. A movable electrode is distantly connected from the top of the substrate at a predetermined space via an elastic connector on the substrate and at least one contact member formed on a bottom surface of the movable electrode or on a bottom surface of the elastic connector for attachment to or detachment from the switching contact part. At least one pivot boss is formed on either the bottom surface of the movable electrode or on the top of the substrate.
Public/Granted literature
- US20070018760A1 MEMS switch and manufacturing method thereof Public/Granted day:2007-01-25
Information query