Invention Grant
- Patent Title: Apparatus for fabrication of GaN bulk single crystal and fabrication method of GaN single crystal ingot using the same
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Application No.: US11937017Application Date: 2007-11-08
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Publication No.: US07449066B2Publication Date: 2008-11-11
- Inventor: Jai-yong Han
- Applicant: Jai-yong Han
- Applicant Address: KR Suwon-Si, Gyeonggi-Do
- Assignee: Samsung Corning Co., Ltd.
- Current Assignee: Samsung Corning Co., Ltd.
- Current Assignee Address: KR Suwon-Si, Gyeonggi-Do
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: KR10-2005-0007999 20050128
- Main IPC: C30B35/00
- IPC: C30B35/00

Abstract:
An apparatus for fabricating a GaN single crystal and a fabrication method for producing GaN single crystal ingot are provided. The apparatus includes: a reactor including a ceiling, a floor and a wall with a predetermined height encompassing an internal space between the ceiling and the floor, wherein the ceiling is opposite to the floor; a quartz vessel on the floor containing Ga metal; a mount installed on the ceiling on which a GaN substrate is mounted, the GaN substrate being opposite to the quartz vessel; a first gas supplying unit supplying the quartz vessel with hydrogen chloride (HCl) gas; a second gas supplying unit supplying the internal space of the reactor with ammonia (NH3) gas; and a heating unit installed in conjunction with the wall of the reactor for heating the internal space, wherein the lower portion of the internal space is heated to a higher temperature than the upper portion.
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