发明授权
US07449077B2 Method for the production of monolithic multilayer actuator monolithic multilayer actuator made of a piezoceramic or electrostrictive material and external electrical contact for a monolithic multilayer actuator
有权
用于生产由压电陶瓷或电致伸缩材料制成的单块多层致动器单片多层致动器的方法和用于单片多层致动器的外部电接触
- 专利标题: Method for the production of monolithic multilayer actuator monolithic multilayer actuator made of a piezoceramic or electrostrictive material and external electrical contact for a monolithic multilayer actuator
- 专利标题(中): 用于生产由压电陶瓷或电致伸缩材料制成的单块多层致动器单片多层致动器的方法和用于单片多层致动器的外部电接触
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申请号: US10517192申请日: 2003-05-14
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公开(公告)号: US07449077B2公开(公告)日: 2008-11-11
- 发明人: Astrid Heinzmann , Eberhard Hennig , Daniel Kopsch , Patrick Pertsch , Stefan Richter , Eike Wehrsdorfer
- 申请人: Astrid Heinzmann , Eberhard Hennig , Daniel Kopsch , Patrick Pertsch , Stefan Richter , Eike Wehrsdorfer
- 申请人地址: DE Lederhose
- 专利权人: Pi Ceramic GmbH Keramische Technologien und Bauelemente
- 当前专利权人: Pi Ceramic GmbH Keramische Technologien und Bauelemente
- 当前专利权人地址: DE Lederhose
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权: DE10225405 20020607; DE10234787 20020730
- 国际申请: PCT/EP03/05051 WO 20030514
- 国际公布: WO03/105246 WO 20031218
- 主分类号: H01L41/24
- IPC分类号: H01L41/24
摘要:
The invention relates to a method for the production of a monolithic multilayer actuator, a corresponding monolithic multilayer actuator, as well as an external contact for a monolithic multilayer actuator. According to the invention specific microdisturbances are incorporated in the actuator structure along the longitudinal axis of the stack essentially parallel and spaced to the inner electrodes in the area of the at least two opposite outer surfaces to which the inner electrodes known per se are brought out, which at the earliest during polarisation of the actuator are subject to a pregiven, limited, stress-reducing growth into the interior and/or towards the outer electrode, wherein additionally the basic metallic coating and/or the external contact is formed elongation-resistant or elastic at least in the area of the microdisturbances.
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