Invention Grant
- Patent Title: Electromechanical dynamic force profile articulating mechanism
- Patent Title (中): 机电动力分布关节机构
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Application No.: US11215514Application Date: 2005-08-30
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Publication No.: US07449759B2Publication Date: 2008-11-11
- Inventor: Martin G. Selbrede , Carey King , Dan Van Ostrand
- Applicant: Martin G. Selbrede , Carey King , Dan Van Ostrand
- Applicant Address: US TX The Woodlands
- Assignee: Uni-Pixel Displays, Inc.
- Current Assignee: Uni-Pixel Displays, Inc.
- Current Assignee Address: US TX The Woodlands
- Agency: Fish & Richardson P.C.
- Agent Kelly K. Kordzik
- Main IPC: H01L29/82
- IPC: H01L29/82

Abstract:
An electromechanical dynamic force profile articulating mechanism for recovering or emulating true parallel plate capacitor actuation behaviors from deformable membranes used in MEMS systems. The curved deformation of flexible membranes causes their MEMS behavior to deviate from known interactions between rigid plates that maintain geometric parallelism during ponderomotive actuation. The present invention teaches three methods for reacquiring parallel plate behavior: superaddition or in situ integration of a rigid region within or upon the deformable MEMS membrane; creation of isodyne regions to secure parallelism by altering the force profile upon the membrane by introducing tuned and shaped voids within the conductive region associated with the membrane; and a hybrid composite approach wherein the conductive region is deposited after deposition of a raised rigid zone, thereby emulating isodyne behavior due to the increased inter-conductor distance in the vicinity of the rigid zone, in conjunction with rigidity benefits stemming directly from said zone.
Public/Granted literature
- US20070047051A1 Electromechanical dynamic force profile articulating mechanism Public/Granted day:2007-03-01
Information query
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