发明授权
- 专利标题： Fanned laser beam metrology system
- 专利标题（中）： 扇形激光束计量系统
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申请号： US11270000申请日： 2005-11-09
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公开(公告)号： US07450251B2公开(公告)日： 2008-11-11
- 发明人: Ketao Liu , Peter J. Sedivec , Douglas Bender , Gregory S. Becker , John Y. Liu , Richard W. Guthrie , Mark A. Lundgren
- 申请人： Ketao Liu , Peter J. Sedivec , Douglas Bender , Gregory S. Becker , John Y. Liu , Richard W. Guthrie , Mark A. Lundgren
- 申请人地址： US IL Chicago
- 专利权人： The Boeing Company
- 当前专利权人： The Boeing Company
- 当前专利权人地址： US IL Chicago
- 代理机构： MacPherson Kwok Chen & Heid LLP
- 代理商 Jonathan W. Hallman
- 主分类号： G01C1/03
- IPC分类号： G01C1/03 ; G01B11/26
摘要：
Systems and techniques for laser metrology. A system may include a laser source and a fanning apparatus configured to generate a fanned laser beam. The fanned laser beam may be scanned across the surface of an object, and may reflect off a plurality of targets positioned on the surface. A position detection module may determine a position of the metrology targets based on the reflected beam.
公开/授权文献
- US20070103698A1 Fanned laser beam metrology system 公开/授权日：2007-05-10
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