发明授权
- 专利标题: Method of manufacturing solid image pickup apparatus
- 专利标题(中): 固体摄像装置的制造方法
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申请号: US11302191申请日: 2005-12-14
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公开(公告)号: US07452744B2公开(公告)日: 2008-11-18
- 发明人: Ken Henmi , Toshihiro Kuriyama
- 申请人: Ken Henmi , Toshihiro Kuriyama
- 申请人地址: JP Osaka
- 专利权人: Panasonic Corporation
- 当前专利权人: Panasonic Corporation
- 当前专利权人地址: JP Osaka
- 代理机构: Steptoe & Johnson LLP
- 优先权: JP2004-370607 20041222
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A first gate electrode and a second gate electrode are formed on a semiconductor substrate, and then a resist pattern is formed so as to selectively leave open a portion including an overlap between the first and second gate electrodes. Next, the overlap between the gate electrodes is removed through isotropic etching. Etching is carried out at this time by an amount within a range of 140% to 200% of the film thickness of the second gate electrode. Next, a normal inter-layer insulating film and light-shielding film are formed. It is possible to eliminate the overlap between the gate electrodes adjacent to an opening of the light-shielding film, suppress the height of the light-shielding film at that portion, reduce shading for the light condensed by a lens and thereby improve the light condensing efficiency of the lens.
公开/授权文献
- US20060134807A1 Method of manufacturing solid image pickup apparatus 公开/授权日:2006-06-22
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