发明授权
- 专利标题: Angular velocity sensor and method of fabrication thereof
- 专利标题(中): 角速度传感器及其制造方法
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申请号: US11338345申请日: 2006-01-24
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公开(公告)号: US07456555B2公开(公告)日: 2008-11-25
- 发明人: Hideryo Matsudo , Masahiro Yoshimatsu , Takahiro Inoue , Kenichi Kikuchi
- 申请人: Hideryo Matsudo , Masahiro Yoshimatsu , Takahiro Inoue , Kenichi Kikuchi
- 申请人地址: JP Tokyo
- 专利权人: Nihon Dempa Kogyo Co., Ltd.
- 当前专利权人: Nihon Dempa Kogyo Co., Ltd.
- 当前专利权人地址: JP Tokyo
- 代理机构: Edwards Angell Palmer & Dodge LLP
- 代理商 Scott D. Wofsy
- 优先权: JP2005-016785 20050125
- 主分类号: H03H9/21
- IPC分类号: H03H9/21
摘要:
The present invention provides an angular velocity sensor and a method of fabrication thereof that facilitates the work of affixing a tuning-fork-type crystal element and adjusting the same, preventing waste caused by scrapping defective products and also encouraging miniaturization of components. The angular velocity sensor comprises: a tuning-fork-type crystal element which is provided with a drive electrode for exciting the vibration of the tuning fork and a sensor electrode for detecting an electrical charge that is generated in response to an angular velocity that is being detected; an independent pedestal to which a main surface of a tuning-fork base portion of the tuning-fork-type crystal element is previously affixed to form an integrated unit; a main package for surface mounting, in which the tuning-fork-type crystal element is hermetically sealed and which has a cavity with an inner base surface to which the pedestal integrated with the tuning-fork-type crystal element is affixed; and an IC having an oscillation circuit for driving the tuning-fork-type crystal element and a signal processing circuit for creating a signal in correspondence to the angular velocity corresponding to the electrical charge, and which is also disposed either inside or outside the package. The pedestal has a weight and/or shape that ensures that the center of gravity of the tuning-fork-type crystal element that is integrated therewith moves towards the tuning-fork base portion side, maintaining the horizontal alignment of the tuning-fork-type crystal element.
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