发明授权
- 专利标题： MEMS tunable vertical-cavity semiconductor optical amplifier
- 专利标题（中）： MEMS可调垂直腔半导体光放大器
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申请号： US11442100申请日： 2006-05-26
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公开(公告)号： US07457033B2公开(公告)日： 2008-11-25
- 发明人: Garrett D. Cole , E. Staffan Björlin , Qi Chen , Noel C. MacDonald , John E. Bowers
- 申请人： Garrett D. Cole , E. Staffan Björlin , Qi Chen , Noel C. MacDonald , John E. Bowers
- 申请人地址： US CA Oakland
- 专利权人： The Regents of the University of California
- 当前专利权人： The Regents of the University of California
- 当前专利权人地址： US CA Oakland
- 代理机构： Gates & Cooper LLP
- 主分类号： H01S5/00
- IPC分类号： H01S5/00 ; H01S3/086 ; H01S3/16 ; H01S5/187 ; H01S5/343
摘要：
A MEMS-tunable semiconductor optical amplifier (SOA). A device in accordance with the present invention comprises a substrate, a first mirror, coupled to the substrate, a second mirror, an active region, coupled between the first and second mirror, and a microelectromechanical actuator, coupled to the second mirror, wherein a voltage is applied to the microelectromechanical actuator to tune the SOA.
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