Invention Grant
- Patent Title: MEMS passivation with transition metals
- Patent Title (中): 具有过渡金属的MEMS钝化
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Application No.: US11029985Application Date: 2005-01-05
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Publication No.: US07459325B2Publication Date: 2008-12-02
- Inventor: Simon Joshua Jacobs , Seth Adrian Miller
- Applicant: Simon Joshua Jacobs , Seth Adrian Miller
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Wade J. Brady, III; Frederick J. Telecky, Jr.
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
Organic surfactants are employed to passivate the surfaces of MEMS devices, such as digital micromirrors. The binding of these surfactants to the surface is improved by first associating with the surface transition metal atoms or ions from Groups IVB, VB, and IVB of the periodic table.
Public/Granted literature
- US20050145961A1 MEMS passivation with transition metals Public/Granted day:2005-07-07
Information query
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