发明授权
- 专利标题： MEMS passivation with transition metals
- 专利标题（中）： 具有过渡金属的MEMS钝化
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申请号： US11029985申请日： 2005-01-05
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公开(公告)号： US07459325B2公开(公告)日： 2008-12-02
- 发明人: Simon Joshua Jacobs , Seth Adrian Miller
- 申请人： Simon Joshua Jacobs , Seth Adrian Miller
- 申请人地址： US TX Dallas
- 专利权人： Texas Instruments Incorporated
- 当前专利权人： Texas Instruments Incorporated
- 当前专利权人地址： US TX Dallas
- 代理商 Wade J. Brady, III; Frederick J. Telecky, Jr.
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
Organic surfactants are employed to passivate the surfaces of MEMS devices, such as digital micromirrors. The binding of these surfactants to the surface is improved by first associating with the surface transition metal atoms or ions from Groups IVB, VB, and IVB of the periodic table.
公开/授权文献
- US20050145961A1 MEMS passivation with transition metals 公开/授权日：2005-07-07
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