Invention Grant
- Patent Title: Micro mirror unit and method of making the same
- Patent Title (中): 微镜单元及其制作方法
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Application No.: US11589075Application Date: 2006-10-30
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Publication No.: US07459331B2Publication Date: 2008-12-02
- Inventor: Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
- Applicant: Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
- Applicant Address: JP Kawasaki
- Assignee: Fujitsu Limited
- Current Assignee: Fujitsu Limited
- Current Assignee Address: JP Kawasaki
- Agency: Kratz, Quintos & Hanson, LLP.
- Priority: JP2002-170291 20020611
- Main IPC: H01L21/00
- IPC: H01L21/00
Abstract:
A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.
Public/Granted literature
- US20070041080A1 Micro mirror unit and method of making the same Public/Granted day:2007-02-22
Information query
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