发明授权
- 专利标题： Micro mirror unit and method of making the same
- 专利标题（中）： 微镜单元及其制作方法
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申请号： US11589075申请日： 2006-10-30
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公开(公告)号： US07459331B2公开(公告)日： 2008-12-02
- 发明人: Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
- 申请人： Yoshihiro Mizuno , Satoshi Ueda , Osamu Tsuboi , Ippei Sawaki , Hisao Okuda , Norinao Kouma , Hiromitsu Soneda , Fumio Yamagishi
- 申请人地址： JP Kawasaki
- 专利权人： Fujitsu Limited
- 当前专利权人： Fujitsu Limited
- 当前专利权人地址： JP Kawasaki
- 代理机构： Kratz, Quintos & Hanson, LLP.
- 优先权： JP2002-170291 20020611
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
A micro mirror unit includes a moving part carrying a mirror portion, a frame and torsion bars connecting the moving part to the frame. The moving part, the frame and the torsion bars are formed integral from a material substrate. The frame includes a portion thicker than the moving part.
公开/授权文献
- US20070041080A1 Micro mirror unit and method of making the same 公开/授权日：2007-02-22
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