- 专利标题： Deviation angle self compensating substantially achromatic retarder
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申请号： US11590408申请日： 2006-10-31
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公开(公告)号： US07460230B2公开(公告)日： 2008-12-02
- 发明人: Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer
- 申请人： Blaine D. Johs , Steven E. Green , Craig M. Herzinger , Duane E. Meyer
- 申请人地址： US NE Lincoln
- 专利权人： J.A. Woollam Co., Inc.
- 当前专利权人： J.A. Woollam Co., Inc.
- 当前专利权人地址： US NE Lincoln
- 代理商 James D. Welch
- 主分类号： G01J4/00
- IPC分类号： G01J4/00 ; G02B5/30
摘要：
A substantially achromatic multiple element compensator system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.