发明授权
- 专利标题： Highly purified liquid perfluoro-n-alkanes and method for preparing
- 专利标题（中）： 高纯液体全氟正烷烃及其制备方法
-
申请号： US11074440申请日： 2005-03-08
-
公开(公告)号： US07465667B2公开(公告)日： 2008-12-16
- 发明人: Robert Clayton Wheland , Roger Harquail French
- 申请人： Robert Clayton Wheland , Roger Harquail French
- 申请人地址： US DE Wilmington
- 专利权人： E.I. du Pont de Nemours and Company
- 当前专利权人： E.I. du Pont de Nemours and Company
- 当前专利权人地址： US DE Wilmington
- 主分类号： H01L21/302
- IPC分类号： H01L21/302
摘要：
The present invention is drawn to liquid perfluoro-n-alkanes that are highly transparent to UV wavelengths ranging from about 150 nm to 165 nm, and to the method by which high transparency may be obtained. The liquid perfluoro-n-alkanes of the invention are useful in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography at 157 nm exposure wavelength.
公开/授权文献
信息查询
IPC分类:
