Invention Grant
- Patent Title: Highly purified liquid perfluoro-n-alkanes and method for preparing
- Patent Title (中): 高纯液体全氟正烷烃及其制备方法
-
Application No.: US11074440Application Date: 2005-03-08
-
Publication No.: US07465667B2Publication Date: 2008-12-16
- Inventor: Robert Clayton Wheland , Roger Harquail French
- Applicant: Robert Clayton Wheland , Roger Harquail French
- Applicant Address: US DE Wilmington
- Assignee: E.I. du Pont de Nemours and Company
- Current Assignee: E.I. du Pont de Nemours and Company
- Current Assignee Address: US DE Wilmington
- Main IPC: H01L21/302
- IPC: H01L21/302
Abstract:
The present invention is drawn to liquid perfluoro-n-alkanes that are highly transparent to UV wavelengths ranging from about 150 nm to 165 nm, and to the method by which high transparency may be obtained. The liquid perfluoro-n-alkanes of the invention are useful in optical couplants, optical cements, optical elements, optical inspection media for semiconductor wafers and devices, and immersion photolithography at 157 nm exposure wavelength.
Public/Granted literature
- US20050288535A1 Highly purified liquid perfluoro-n-alkanes and method for preparing Public/Granted day:2005-12-29
Information query
IPC分类:
