发明授权
US07468794B1 Rotating compensator ellipsometer system with spatial filter equivalent
有权
具有空间滤波器等效旋转补偿器椭偏仪系统
- 专利标题： Rotating compensator ellipsometer system with spatial filter equivalent
- 专利标题（中）： 具有空间滤波器等效旋转补偿器椭偏仪系统
-
申请号： US11204929申请日： 2005-08-15
-
公开(公告)号： US07468794B1公开(公告)日： 2008-12-23
- 发明人: Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He
- 申请人： Martin M. Liphardt , Blaine D. Johs , Craig M. Herzinger , Ping He
- 申请人地址： US NE Lincoln
- 专利权人： J.A. Woollam Co., Inc.
- 当前专利权人： J.A. Woollam Co., Inc.
- 当前专利权人地址： US NE Lincoln
- 代理商 James D. Welch
- 主分类号： G01J4/00
- IPC分类号： G01J4/00
摘要：
Application of a spatial filter equivalent constructed from a converging lens and an optical fiber in rotating compensator ellipsometer systems, after a sample system. The purpose is to eliminate a radially outer annulus of a generally arbitrary Profile beam that presents with low intensity level irregular content, so that electromagnetic beam intensity is caused to quickly decay to zero as a function of radius.