发明授权
- 专利标题： Spatial optical modulator with passivation layer
- 专利标题（中）： 具有钝化层的空间光学调制器
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申请号： US11591226申请日： 2006-10-31
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公开(公告)号： US07468825B2公开(公告)日： 2008-12-23
- 发明人: Je-Hong Kyoung , Jae-Wook Jang , Jong-Hyeong Song , Yun-Jin Ko , Seung-Do An
- 申请人： Je-Hong Kyoung , Jae-Wook Jang , Jong-Hyeong Song , Yun-Jin Ko , Seung-Do An
- 申请人地址： KR Suwon-si
- 专利权人： Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人： Samsung Electro-Mechanics Co., Ltd.
- 当前专利权人地址： KR Suwon-si
- 代理机构： Christensen O'Connor Johnson Kindness PLLC
- 优先权： KR10-2005-0104018 20051101; KR10-2005-0123395 20051214; KR10-2006-0097428 20061002; KR10-2006-0097435 20061002
- 主分类号： G02B26/08
- IPC分类号： G02B26/08
摘要：
Disclosed is an optical modulator including: a substrate; an insulation layer disposed on the substrate; a ribbon layer, a center portion of which is spaced apart from the insulation layer by a predetermined gap; a piezoelectric element that is disposed on the ribbon layer and allows the center portion of the ribbon layer to bend vertically; and a passivation layer that is disposed on the piezoelectric element and comprises a main passivation film.
公开/授权文献
- US20070097488A1 Spatial optical modulator with passivation layer 公开/授权日：2007-05-03
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