发明授权
- 专利标题: Gas discharge laser output light beam parameter control
- 专利标题(中): 气体放电激光输出光束参数控制
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申请号: US11095293申请日: 2005-03-31
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公开(公告)号: US07471708B2公开(公告)日: 2008-12-30
- 发明人: Herve A. Besaucele , Igor V. Fomenkov , William N. Partlo , Fedor B. Trintchouk , Hao Ton That
- 申请人: Herve A. Besaucele , Igor V. Fomenkov , William N. Partlo , Fedor B. Trintchouk , Hao Ton That
- 申请人地址: US CA San Diego
- 专利权人: Cymer, Inc.
- 当前专利权人: Cymer, Inc.
- 当前专利权人地址: US CA San Diego
- 主分类号: H01S3/13
- IPC分类号: H01S3/13 ; H01S3/00 ; H01S3/22
摘要:
A line narrowed gas discharge laser system and method of operation are disclosed which may comprise: an oscillator cavity; a laser chamber comprising a chamber housing containing a lasing medium gas; at least one peaking capacitor electrically connected to the chamber housing and to a first one of a pair of electrodes; a second one of the pair of electrodes connected to an opposite terminal of the at least one peaking capacitor; a current return path connected to the chamber housing; the one terminal, the first one of the electrodes, the lasing medium gas, the second one of the electrodes, the current return path and the second terminal forming a head current inductive loop having an inductance unique to the particular head current inductive loop; a spectral quality tuning mechanism comprising a mechanism for changing the particular head current inductive loop inductance value for the particular head current inductance loop.
公开/授权文献
- US20060227839A1 Gas discharge laser output light beam parameter control 公开/授权日:2006-10-12