发明授权
US07473612B2 Method for fabricating a variable-resistance element including heating a RMCoO3 perovskite structure in an oxygen atmosphere
有权
制造可变电阻元件的方法，包括在氧气氛中加热RMCoO3钙钛矿结构
- 专利标题： Method for fabricating a variable-resistance element including heating a RMCoO3 perovskite structure in an oxygen atmosphere
- 专利标题（中）： 制造可变电阻元件的方法，包括在氧气氛中加热RMCoO3钙钛矿结构
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申请号： US11417200申请日： 2006-05-04
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公开(公告)号： US07473612B2公开(公告)日： 2009-01-06
- 发明人: Tsutomu Kanno , Akihiro Odagawa , Yasunari Sugita , Akihiro Sakai , Hideaki Adachi
- 申请人： Tsutomu Kanno , Akihiro Odagawa , Yasunari Sugita , Akihiro Sakai , Hideaki Adachi
- 申请人地址： JP Osaka
- 专利权人： Panasonic Corporation
- 当前专利权人： Panasonic Corporation
- 当前专利权人地址： JP Osaka
- 代理机构： McDermott Will & Emery LLP
- 优先权： JP2004-266381 20040914
- 主分类号： H01L21/20
- IPC分类号： H01L21/20
摘要：
A method for fabricating a variable-resistance element, the resistance of a material layer being variable in accordance with an electric current or voltage applied across first and second electrodes, the method including: (1) a first electrode production step; (2) a step of forming the material layer on the first electrode, wherein the material layer comprises an oxide semiconductor having a perovskite structure represented by the chemical formula RMCoO3, wherein R is a rare-earth element and M is an alkaline-earth element; (3) an oxygen treatment step of heating the material layer in an oxygen atmosphere; (4) a step of forming the second electrode on the material layer that was subjected to the oxygen treatment step; and (5) a hydrogen treatment step of heating the material layer in a reducing atmosphere containing hydrogen.
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