发明授权
- 专利标题: Method for manufacturing thin film transistor
- 专利标题(中): 制造薄膜晶体管的方法
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申请号: US10592527申请日: 2005-03-15
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公开(公告)号: US07476572B2公开(公告)日: 2009-01-13
- 发明人: Masafumi Morisue , Gen Fujii
- 申请人: Masafumi Morisue , Gen Fujii
- 申请人地址: JP Kanagawa-Ken
- 专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人: Semiconductor Energy Laboratory Co., Ltd.
- 当前专利权人地址: JP Kanagawa-Ken
- 代理机构: Nixon Peabody LLP
- 代理商 Jeffrey L. Costellia
- 优先权: JP2004-088848 20040325
- 国际申请: PCT/JP2005/005063 WO 20050315
- 国际公布: WO2005/093813 WO 20051006
- 主分类号: H01L21/00
- IPC分类号: H01L21/00 ; H01L21/84
摘要:
An object of the invention is to provide a method for manufacturing a thin film transistor in a self-aligning manner by using the droplet discharging method regardless of the accuracy of a discharge position for a droplet discharging device. In view of the object, an organic resin film or the like is applied and processed into a predetermined shape by etch-back, exposure, development and the like. By utilizing the organic resin film with the predetermined shape as a mask, a semiconductor layer containing an impurity of one conductivity type is etched. By utilizing the organic resin film with the predetermined shape, regions with different wettabilities are formed.
公开/授权文献
- US20070196962A1 Method for manufacturing thin film transistor 公开/授权日:2007-08-23
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