发明授权
- 专利标题： Semiconductor manufacturing apparatus, management apparatus therefor, component management apparatus therefor, and semiconductor wafer storage vessel transport apparatus
- 专利标题（中）： 半导体制造装置，其管理装置，其部件管理装置和半导体晶片储存容器输送装置
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申请号： US11404754申请日： 2006-04-17
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公开(公告)号： US07478347B2公开(公告)日： 2009-01-13
- 发明人: Hiromi Yajima , Tatsumi Suganuma , Noriaki Yoshikawa , Tadashi Yotsumoto , Kenji Nakata
- 申请人： Hiromi Yajima , Tatsumi Suganuma , Noriaki Yoshikawa , Tadashi Yotsumoto , Kenji Nakata
- 申请人地址： JP Tokyo
- 专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人： Kabushiki Kaisha Toshiba
- 当前专利权人地址： JP Tokyo
- 代理机构： Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权： JP2002-058489 20020305
- 主分类号： G06F17/50
- IPC分类号： G06F17/50 ; G06F19/00 ; G06F11/30
摘要：
A semiconductor manufacturing apparatus having a plurality of portions according to this invention includes a storage device which stores, for each portion, information representing the lapsed time of use or the product processing count till occurrence of a failure after installation of the portion, and a calculation device which receives the information stored in the storage device and outputs function information representing a failure probability and/or failure rate as a function of the lapsed time of use or the product processing count for each portion.
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