发明授权
US07481942B2 Monolithic ink-jet printhead and method of manufacturing the same 失效
单片喷墨打印头及其制造方法

Monolithic ink-jet printhead and method of manufacturing the same
摘要:
An ink-jet printhead and a method of manufacturing the same include a substrate on which a heater and a passivation layer protecting the heater are formed, a passage plate on which an ink chamber corresponding to the heater and an ink passage connected to the ink chamber are formed, and a nozzle plate in which an orifice corresponding to the ink chamber is formed. An exposure stop layer (ESL) that blocks passage of a photosensitive energy is formed inside the nozzle plate, and the nozzle plate and the passage plate are bonded with each other by the exposure stop layer (ESL).
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