发明授权
- 专利标题: Monolithic ink-jet printhead and method of manufacturing the same
- 专利标题(中): 单片喷墨打印头及其制造方法
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申请号: US10422824申请日: 2003-04-25
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公开(公告)号: US07481942B2公开(公告)日: 2009-01-27
- 发明人: Jae-sik Min , Byung-ha Park , Myung-jong Kwon , Young-shik Park , Yun-gi Kim
- 申请人: Jae-sik Min , Byung-ha Park , Myung-jong Kwon , Young-shik Park , Yun-gi Kim
- 申请人地址: KR Suwon-Si
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-Si
- 代理机构: Staas & Halsey LLP
- 优先权: KR10-2002-0050527 20020826
- 主分类号: B41J2/135
- IPC分类号: B41J2/135
摘要:
An ink-jet printhead and a method of manufacturing the same include a substrate on which a heater and a passivation layer protecting the heater are formed, a passage plate on which an ink chamber corresponding to the heater and an ink passage connected to the ink chamber are formed, and a nozzle plate in which an orifice corresponding to the ink chamber is formed. An exposure stop layer (ESL) that blocks passage of a photosensitive energy is formed inside the nozzle plate, and the nozzle plate and the passage plate are bonded with each other by the exposure stop layer (ESL).