发明授权
- 专利标题: Polishing composition and rinsing composition
- 专利标题(中): 抛光组合物和漂洗组合物
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申请号: US10533888申请日: 2003-11-07
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公开(公告)号: US07481949B2公开(公告)日: 2009-01-27
- 发明人: Akihiro Kawase , Toshihiro Miwa , Kenji Sakamoto , Ichiro Hayashida
- 申请人: Akihiro Kawase , Toshihiro Miwa , Kenji Sakamoto , Ichiro Hayashida
- 申请人地址: JP Osaka
- 专利权人: Wako Pure Chemical Industries, Ltd
- 当前专利权人: Wako Pure Chemical Industries, Ltd
- 当前专利权人地址: JP Osaka
- 代理机构: Vidas, Arrett & Steinkraus PA
- 优先权: JP2002-325220 20021108
- 国际申请: PCT/JP03/14224 WO 20031107
- 国际公布: WO2004/042812 WO 20040521
- 主分类号: C09K13/00
- IPC分类号: C09K13/00 ; H01L21/302
摘要:
A polishing composition and a rinsing composition according to the present invention can effectively suppress wafer contamination caused by metal impurities. The polishing composition includes a chelating agent, an alkali compound, silicon dioxide and water. The rinsing composition includes a chelating agent, an alkali compound and water. The chelating agent contained in the polishing composition and the rinsing composition is an acid represented by the following chemical formula (1) or a salt thereof. In the chemical formula (1), each of Y2 and Y3 represents an alkylene group, n is an integer of 0 to 4, each of 4+n substituents represented by R8 to R12 is an alkyl group. At least four of the alkyl groups have a phosphonic acid group.
公开/授权文献
- US20060151854A1 Polishing composition and rinsing composition 公开/授权日:2006-07-13
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