发明授权
- 专利标题: LPP EUV light source drive laser system
- 专利标题(中): LPP EUV光源驱动激光系统
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申请号: US11217161申请日: 2005-08-31
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公开(公告)号: US07482609B2公开(公告)日: 2009-01-27
- 发明人: Alexander I. Ershov , Alexander N. Bykanov , Oleh Khodykin , Igor V. Fomenkov
- 申请人: Alexander I. Ershov , Alexander N. Bykanov , Oleh Khodykin , Igor V. Fomenkov
- 申请人地址: US CA San Diego
- 专利权人: Cymer, Inc.
- 当前专利权人: Cymer, Inc.
- 当前专利权人地址: US CA San Diego
- 主分类号: G01J1/00
- IPC分类号: G01J1/00
摘要:
An apparatus and method is disclosed which may comprise a laser produced plasma EUV system which may comprise a drive laser producing a drive laser beam; a drive laser beam first path having a first axis; a drive laser redirecting mechanism transferring the drive laser beam from the first path to a second path, the second path having a second axis; an EUV collector optical element having a centrally located aperture; and a focusing mirror in the second path and positioned within the aperture and focusing the drive laser beam onto a plasma initiation site located along the second axis. The apparatus and method may comprise the drive laser beam is produced by a drive laser having a wavelength such that focusing on an EUV target droplet of less than about 100 μm at an effective plasma producing energy if not practical in the constraints of the geometries involved utilizing a focusing lens. The drive laser may comprise a CO2 laser. The drive laser redirecting mechanism may comprise a mirror.
公开/授权文献
- US20060192152A1 LPP EUV light source drive laser system 公开/授权日:2006-08-31
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