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US07482821B2 Probe card and the production method 有权
探针卡和生产方法

Probe card and the production method
摘要:
A probe card 1 is composed of a plurality of probe pins 50 having wafer-side plungers51 at one end portion and substrate-side plungers52 on the other end side; two probe guides 30 and 40 one above the other for supporting the plurality of probe pins 50, so that the plurality of probe pins 50 are arranged to be corresponding to an arrangement of external terminals of a semiconductor wafer and the wafer-side plungers 51 of the probe pins 50 protrude; a print substrate 10 having pads 13 for the substrate-side plungers 52 of the probe pins 50 supported by the probe guides 30 and 40 to contact; and a stiffener 20 provided on the back surface of the print substrate 10.
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