发明授权
- 专利标题: Probe card and the production method
- 专利标题(中): 探针卡和生产方法
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申请号: US11151664申请日: 2005-06-14
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公开(公告)号: US07482821B2公开(公告)日: 2009-01-27
- 发明人: Takaji Ishikawa , Fumio Kurotori , Tadao Saito
- 申请人: Takaji Ishikawa , Fumio Kurotori , Tadao Saito
- 申请人地址: JP Tokyo
- 专利权人: Advantest Corporation
- 当前专利权人: Advantest Corporation
- 当前专利权人地址: JP Tokyo
- 代理机构: Posz Law Group, PLC
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
A probe card 1 is composed of a plurality of probe pins 50 having wafer-side plungers51 at one end portion and substrate-side plungers52 on the other end side; two probe guides 30 and 40 one above the other for supporting the plurality of probe pins 50, so that the plurality of probe pins 50 are arranged to be corresponding to an arrangement of external terminals of a semiconductor wafer and the wafer-side plungers 51 of the probe pins 50 protrude; a print substrate 10 having pads 13 for the substrate-side plungers 52 of the probe pins 50 supported by the probe guides 30 and 40 to contact; and a stiffener 20 provided on the back surface of the print substrate 10.
公开/授权文献
- US20050280428A1 Probe card and the production method 公开/授权日:2005-12-22
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