发明授权
US07483150B2 Measuring device having an optical probe tip 有权
具有光学探针尖端的测量装置

  • 专利标题: Measuring device having an optical probe tip
  • 专利标题(中): 具有光学探针尖端的测量装置
  • 申请号: US11579418
    申请日: 2005-04-20
  • 公开(公告)号: US07483150B2
    公开(公告)日: 2009-01-27
  • 发明人: Peter Lehmann
  • 申请人: Peter Lehmann
  • 申请人地址: DE Gottingen
  • 专利权人: Carl Mahr Holding GmbH
  • 当前专利权人: Carl Mahr Holding GmbH
  • 当前专利权人地址: DE Gottingen
  • 代理机构: Venable, LLP
  • 代理商 Ralph P. Albrecht; Ryan M. Flandro
  • 优先权: DE102004022454 20040506
  • 国际申请: PCT/EP2005/004223 WO 20050420
  • 国际公布: WO2005/108919 WO 20051117
  • 主分类号: G01B11/24
  • IPC分类号: G01B11/24
Measuring device having an optical probe tip
摘要:
A measuring device (1) for measuring the shape, contour and/or roughness of a workpiece is based on a contact-less optical probe having a large numeric aperture. The probe has at least two different focal points with which at least two photo receptors are associated. The latter generate a differential signal for controlling a positioning device (13) for tracking the optical probe in such a manner that the workpiece surface is maintained within the measuring range of the probe. The differential signal is proven to result in a rapid and accurate tracking of the position of the sensor arrangement (3).
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