发明授权
- 专利标题: Displacement sensor
- 专利标题(中): 位移传感器
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申请号: US11586002申请日: 2006-10-25
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公开(公告)号: US07486409B2公开(公告)日: 2009-02-03
- 发明人: Yoshihiro Yamashita , Hirotaka Nakashima , Masahiro Kawachi
- 申请人: Yoshihiro Yamashita , Hirotaka Nakashima , Masahiro Kawachi
- 申请人地址: JP Kyoto-shi
- 专利权人: Omron Corporation
- 当前专利权人: Omron Corporation
- 当前专利权人地址: JP Kyoto-shi
- 代理机构: Foley & Lardner LLP
- 优先权: JP2005-313968 20051028
- 主分类号: G01B11/14
- IPC分类号: G01B11/14
摘要:
In a sensor head, parallel rays or approximately parallel rays are generated by a pair of condenser lenses that reciprocate according to vibrations of a collimate lens and a tuning fork, and go out from a light port. To the light port, a lens holder in which an objective lens is supported is detachably attached. The light from the light port is processed to measurement beams that are condensed by the objective lens to a predetermined position.
公开/授权文献
- US20070103701A1 Displacement sensor 公开/授权日:2007-05-10
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