发明授权
US07487069B2 Method for generating a control output for a position control loop
有权
用于产生位置控制回路的控制输出的方法
- 专利标题: Method for generating a control output for a position control loop
- 专利标题(中): 用于产生位置控制回路的控制输出的方法
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申请号: US11862808申请日: 2007-09-27
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公开(公告)号: US07487069B2公开(公告)日: 2009-02-03
- 发明人: Sven Vogler , Roland Kaplan , Robert Weikert , Roelof Wijnaendts-Van-Resandt
- 申请人: Sven Vogler , Roland Kaplan , Robert Weikert , Roelof Wijnaendts-Van-Resandt
- 申请人地址: DE Heidelberg
- 专利权人: Heidelberg Instruments Mikrotechnik GmbH
- 当前专利权人: Heidelberg Instruments Mikrotechnik GmbH
- 当前专利权人地址: DE Heidelberg
- 代理机构: Crowell & Moring LLP
- 优先权: DE10002196 20000119
- 主分类号: G05B19/18
- IPC分类号: G05B19/18
摘要:
A method for optically detecting the position of a moveable test object (10), especially a mirror or reflector, in which a measuring beam (6) produced by a light source (2) is reflected by the test object (10 and reaches a position-sensitive light detector (12) which carrier out a conversion into information corresponding to the position of the test object (10). The invention enables the position of mirrors, especially rotating mirrors, to be quickly measured optically using a simple optical construction. The measuring beam (6) is focused onto the light detector (12) by an optical system (8). A signal corresponding to the geometric center or the maximum (I0) of the intensity distribution of the focused measuring spot is determined based on the measured values obtained by the light detector (12).