发明授权
US07491041B2 Multistage roots-type vacuum pump 有权
多级根型真空泵

Multistage roots-type vacuum pump
摘要:
The invention reduces power consumption and makes a rotor with ease. As illustrated in FIG. 2, a multistage roots pump (1) in the invention includes upstream rotors (R1a, R1b, R2a, R2b) having multiple teeth, supported by a pair of revolving shafts (A1, A2); and downstream rotors (R3a, R3b-R5a, R5b) having an identical number of teeth (31) with the upstream rotors, supported by revolving shafts (A1, A2). The discharge area formed by the outer periphery of the downstream rotors (R3a, R3b-R5a, R5b) and the inner periphewy of the pump chambers (P1-P5) is smaller than that of the upstream rotors (R1a, R1b, R2a, R2b).
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