发明授权
US07491301B2 Methods and apparatuses for depositing film on both sides of a pane
有权
用于在玻璃板两侧沉积薄膜的方法和装置
- 专利标题: Methods and apparatuses for depositing film on both sides of a pane
- 专利标题(中): 用于在玻璃板两侧沉积薄膜的方法和装置
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申请号: US10922719申请日: 2004-08-20
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公开(公告)号: US07491301B2公开(公告)日: 2009-02-17
- 发明人: Annette J. Krisko , Bob Bond , Roger Stanek , Gary Pfaff , Klaus Hartig
- 申请人: Annette J. Krisko , Bob Bond , Roger Stanek , Gary Pfaff , Klaus Hartig
- 申请人地址: US MN Eden Prairie
- 专利权人: Cardinal CG Company
- 当前专利权人: Cardinal CG Company
- 当前专利权人地址: US MN Eden Prairie
- 代理机构: Fredrikson & Byron, P.A.
- 主分类号: C23C14/34
- IPC分类号: C23C14/34
摘要:
A method and apparatus for coating two sides of a single pane of glass or other substrate in a single pass through a coating apparatus. A sputtering line is provided, this line comprising a series of sputtering chambers. At least one of the chambers comprises a downward sputtering chamber having an upper target. At least one of the chambers comprises an upward sputtering chamber having a lower target. In some embodiments, the upper and lower targets are rotary targets. The coating apparatus advantageously has a plurality of transport rollers for conveying the substrate along the sputtering line. In certain embodiments, a majority of the chambers of the sputtering line are downward sputtering chambers each having only an upper target with no lower target.
公开/授权文献
- US20050016835A1 Soil-resistant coating for glass surfaces 公开/授权日:2005-01-27