发明授权
- 专利标题： Micromechanical pressure sensor system
- 专利标题（中）： 微机械压力传感器系统
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申请号： US11592904申请日： 2006-11-02
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公开(公告)号： US07493819B2公开(公告)日： 2009-02-24
- 发明人: Hubert Benzel , Roland Guenschel
- 申请人： Hubert Benzel , Roland Guenschel
- 申请人地址： DE Stuttgart
- 专利权人： Robert Bosch GmbH
- 当前专利权人： Robert Bosch GmbH
- 当前专利权人地址： DE Stuttgart
- 代理机构： Kenyon & Kenyon LLP
- 优先权： DE102005053861 20051111
- 主分类号： G01L7/08
- IPC分类号： G01L7/08 ; G01L9/06 ; G01L9/12 ; H01L21/00
摘要：
A micromechanical pressure sensor includes a substrate having a front side and a back side, the front side facing a medium and the back side being situated on the opposite side of the substrate. A sensor diaphragm having at least one sensor area is situated on the front side, and a recess or cavity is situated behind the sensor diaphragm, and electrical contacting is provided on the back side.
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