Invention Grant
- Patent Title: Probe for a scanning magnetic force microscope, method for producing the same, and method for forming ferromagnetic alloy film on carbon nanotubes
- Patent Title (中): 扫描磁力显微镜的探针及其制造方法以及在碳纳米管上形成铁磁性合金膜的方法
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Application No.: US11322180Application Date: 2005-12-28
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Publication No.: US07495215B2Publication Date: 2009-02-24
- Inventor: Hiroyuki Akinaga , Yasuyuki Semba , Hiroshi Yokoyama , Masatoshi Yasutake , Hiromi Kuramochi
- Applicant: Hiroyuki Akinaga , Yasuyuki Semba , Hiroshi Yokoyama , Masatoshi Yasutake , Hiromi Kuramochi
- Applicant Address: JP Chiyoda-ku JP Mihama-ku
- Assignee: National Institute of Advanced Industrial Science and Technology,SII Nanotechnology Inc.
- Current Assignee: National Institute of Advanced Industrial Science and Technology,SII Nanotechnology Inc.
- Current Assignee Address: JP Chiyoda-ku JP Mihama-ku
- Agency: Seed IP Law Group PLLC
- Priority: JP2004-378606 20041228
- Main IPC: G01N23/00
- IPC: G01N23/00

Abstract:
The present invention provides a probe for a scanning magnetic force microscope having a resolution sufficient to allow observation of a magnetic storage medium with 1200 kFCI or higher recording densities, a method for producing the probe, and a method for forming a ferromagnetic alloy film on a carbon nanotube. In the context of the present invention, the probe for a scanning magnetic force microscope comprises a carbon nanotube whose surface is at least in part coated with a ferromagnetic alloy film consisting of any one of a Co—Fe alloy and a Co—Ni alloy, wherein the arithmetic mean roughness (Ra 10 μm) of the surface of the ferromagnetic alloy film is controlled to 1.15 nm or less. A method for producing such probes for a scanning magnetic force microscope and a method for forming such a ferromagnetic alloy film on a carbon nanotube, so as to achieve such mean surface roughness by controlling the growth rate of the ferromagnetic alloy film within the range of 1.0 to 2.5 nm/min, is also disclosed.
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