发明授权
- 专利标题: Position detecting apparatus and position detecting method
- 专利标题(中): 位置检测装置和位置检测方法
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申请号: US11850364申请日: 2007-09-05
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公开(公告)号: US07495248B2公开(公告)日: 2009-02-24
- 发明人: Soichiro Mitsui , Hideki Ito
- 申请人: Soichiro Mitsui , Hideki Ito
- 申请人地址: JP Tokyo
- 专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人: Kabushiki Kaisha Toshiba
- 当前专利权人地址: JP Tokyo
- 代理机构: Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权: JP2007-045502 20070226
- 主分类号: G01N21/86
- IPC分类号: G01N21/86 ; G01V8/00
摘要:
A position detecting apparatus includes a first illuminating unit that radiates light onto a substrate in a direction substantially parallel to the front and the rear surfaces of the substrate from the direction of a lateral face of the substrate; a second illuminating unit that radiates light onto the front surface of the substrate, in a direction substantially perpendicular to the front surface of the substrate; an image pickup unit that takes an image of the substrate from a rear surface side thereof; and an edge-position detecting unit that detects an edge position of the substrate, based on a first image that is taken while the light is being radiated from the first illuminating unit and a second image that is taken while the light is being radiated from the second illuminating unit, respectively.
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