发明授权
US07495281B2 Non-volatile memory device and methods of forming and operating the same
有权
非易失性存储器件及其形成和操作的方法
- 专利标题: Non-volatile memory device and methods of forming and operating the same
- 专利标题(中): 非易失性存储器件及其形成和操作的方法
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申请号: US11488983申请日: 2006-07-19
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公开(公告)号: US07495281B2公开(公告)日: 2009-02-24
- 发明人: Seung-Jin Yang , Jeong-Uk Han , Kwang-Wook Koh , Jae-Hwang Kim , Sung-Chul Park , Ju-Ri Kim
- 申请人: Seung-Jin Yang , Jeong-Uk Han , Kwang-Wook Koh , Jae-Hwang Kim , Sung-Chul Park , Ju-Ri Kim
- 申请人地址: KR
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR
- 代理机构: Mills & Onello, LLP
- 优先权: KR10-2005-0069564 20050729
- 主分类号: H01L29/788
- IPC分类号: H01L29/788
摘要:
In a non-volatile memory device and methods of forming and operating the same, one memory transistor includes sidewall selection gates covering both sidewalls of a floating gate when the floating gate and a control gate are stacked. The sidewall selection gates are in a spacer form. Since the sidewall selection gates are in a spacer form on the sidewall of the floating gate, the degree of integration of cells can be improved. Additionally, since the side wall selection gates are disposed on both sidewalls of the floating gate, a voltage applied from a bit line and a common source line can be controlled and thus conventional writing/erasing errors can be prevented. Therefore, distribution of threshold voltage can be improved.
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