发明授权
- 专利标题: Optical microcantilever
- 专利标题(中): 光学微悬臂梁
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申请号: US11799974申请日: 2007-05-03
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公开(公告)号: US07496250B2公开(公告)日: 2009-02-24
- 发明人: Takashi Niwa , Kenji Kato , Susumu Ichihara , Norio Chiba , Yasuyuki Mitsuoka , Manabu Oumi , Nobuyuki Kasama
- 申请人: Takashi Niwa , Kenji Kato , Susumu Ichihara , Norio Chiba , Yasuyuki Mitsuoka , Manabu Oumi , Nobuyuki Kasama
- 申请人地址: JP
- 专利权人: Seiko Instruments Inc.
- 当前专利权人: Seiko Instruments Inc.
- 当前专利权人地址: JP
- 代理机构: Adams & Wilks
- 优先权: JP11-72218 19990317; JP2000-40030 20000217
- 主分类号: G02B6/12
- IPC分类号: G02B6/12
摘要:
An optical microcantilever for a scanning near field microscope comprises a support section, a cantilever-shaped optical waveguide, and a light blocking wall. The optical waveguide has a free end, a fixed end fixed to the support section and terminating in a light input/output end, and a tip formed at a side of the free end of the cantilever and having a microscopic aperture at an end thereof. The light blocking wall blocks the transmission of light scattered from a region of the light input/output end in the direction of the tip of the optical waveguide.
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