Invention Grant
- Patent Title: Rectangular parallelepiped fluid storage and dispending vessel
- Patent Title (中): 矩形平行六面体流体储存和分配容器
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Application No.: US11227944Application Date: 2005-09-15
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Publication No.: US07501010B2Publication Date: 2009-03-10
- Inventor: Philip A. Moroco
- Applicant: Dennis Brestovansky , Michael J. Wodjenski , Jose I. Arno , J. Donald Carruthers , Judith A. Moroco, legal representative
- Applicant Address: US CT Danbury
- Assignee: Advanced Technology Materials, Inc.
- Current Assignee: Advanced Technology Materials, Inc.
- Current Assignee Address: US CT Danbury
- Agency: Intellectual Property/Technology Law
- Agent Steven J. Hultquist; Chih-Sheng Lin
- Main IPC: B01D53/04
- IPC: B01D53/04
Abstract:
A fluid storage and dispensing apparatus including a fluid storage and dispensing vessel having a rectangular parallelepiped shape, and an integrated gas cabinet assembly including such fluid storage and dispensing apparatus and/or a point-of-use ventilation gas scrubber in the vented gas cabinet. By the use of physical adsorbent and chemical sorbent media, the gas cabinet can be enhanced in safety of operation, e.g., where the process gas supplied from the gas cabinet is of a toxic or otherwise hazardous character.
Public/Granted literature
- US20060054018A1 Rectangular parallelepiped fluid storage and dispensing vessel Public/Granted day:2006-03-16
Information query
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