Invention Grant
US07501618B2 Deformation method of nanometer scale material using particle beam and nano tool thereby
有权
因此，使用粒子束和纳米工具的纳米尺度材料的变形方法
- Patent Title: Deformation method of nanometer scale material using particle beam and nano tool thereby
- Patent Title (中): 因此，使用粒子束和纳米工具的纳米尺度材料的变形方法
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Application No.: US11678681Application Date: 2007-02-26
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Publication No.: US07501618B2Publication Date: 2009-03-10
- Inventor: Byong-Chon Park , Ki-Young Jung , Sang-Jung Ahn , Dal-Hyun Kim , Jinho Choi , Jae-Wan Hong
- Applicant: Byong-Chon Park , Ki-Young Jung , Sang-Jung Ahn , Dal-Hyun Kim , Jinho Choi , Jae-Wan Hong
- Applicant Address: KR Daejeon
- Assignee: Korea Research Institute of Standards
- Current Assignee: Korea Research Institute of Standards
- Current Assignee Address: KR Daejeon
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Main IPC: G01N23/00
- IPC: G01N23/00 ; G01N23/02
Abstract:
The present invention relates to a deformation method of nanometer-scale material using a particle beam and a nano-tool thereby. The deformation method of the nanometer-scale material using the particle beam according to the present invention is characterized in that the nanometer-scale material is bent toward a direction of the particle beam by irradiating the particle beam on the nanometer-scale material.
Public/Granted literature
- US20080203295A1 DEFORMATION METHOD OF NANOMETER SCALE MATERIAL USING PARTICLE BEAM AND NANO TOOL THEREBY Public/Granted day:2008-08-28
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