- 专利标题： Shielded probe for testing a device under test
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申请号： US11975471申请日： 2007-10-19
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公开(公告)号： US07501842B2公开(公告)日： 2009-03-10
- 发明人: K. Reed Gleason , Tim Lesher , Mike Andrews , John Martin
- 申请人： K. Reed Gleason , Tim Lesher , Mike Andrews , John Martin
- 申请人地址： US OR Beaverton
- 专利权人： Cascade Microtech, Inc.
- 当前专利权人： Cascade Microtech, Inc.
- 当前专利权人地址： US OR Beaverton
- 代理机构： Chernoff, Vilhauer, McClung & Stenzel
- 主分类号： G01R31/02
- IPC分类号： G01R31/02
摘要：
A probe for measuring the electrical characteristics of integrated circuits or other microelectronic devices at high frequencies may include a dielectric substrate that supports a signal path interconnecting test instrumentation and a probe tip and a ground path that shields both the signal path and the probe tip.
公开/授权文献
- US20080042671A1 Probe for testing a device under test 公开/授权日：2008-02-21
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