发明授权
- 专利标题: Optical micro-spectrometer
- 专利标题(中): 光学微光谱仪
-
申请号: US11383723申请日: 2006-05-16
-
公开(公告)号: US07502109B2公开(公告)日: 2009-03-10
- 发明人: Ulrich Bonne , James Detry , Teresa Marta , Klein Johnson
- 申请人: Ulrich Bonne , James Detry , Teresa Marta , Klein Johnson
- 申请人地址: US NJ Morristown
- 专利权人: Honeywell International Inc.
- 当前专利权人: Honeywell International Inc.
- 当前专利权人地址: US NJ Morristown
- 代理商 Kris T. Fredrick
- 主分类号: G01J3/28
- IPC分类号: G01J3/28
摘要:
An optical spectrometer having a multi-wafer structure. The structure may be fabricated with MEMS technology. The spectrometer may be integrated with a fluid analyzer. A reflective grating such as a diffraction or holographic grating situated on the circumference of a Rowland circle along with a point of light emission and a detector may be a configuration of the spectrometer. Some configurations may use an external light source where the light may be optically conveyed to the point of emission on the circle. There may be a Raman configuration where an interaction of light with a sample or an interactive film of a channel in a fluid analyzer is the point of light emission for the spectrometer. In some configurations of the spectrometer, the grating and/or the film may be reflective or transmissive.
公开/授权文献
- US20060262303A1 AN OPTICAL MICRO-SPECTROMETER 公开/授权日:2006-11-23