发明授权
- 专利标题： Surface acoustic wave element and method of manufacturing the same
- 专利标题（中）： 表面声波元件及其制造方法
-
申请号： US11239234申请日： 2005-09-27
-
公开(公告)号： US07504760B2公开(公告)日： 2009-03-17
- 发明人: Haruhiko Fujimoto , Takeshi Ikeda , Toshihiro Meguro , Satoshi Waga , Kyosuke Ozaki
- 申请人： Haruhiko Fujimoto , Takeshi Ikeda , Toshihiro Meguro , Satoshi Waga , Kyosuke Ozaki
- 申请人地址： JP Tokyo
- 专利权人： Alps Electric Co., Ltd.
- 当前专利权人： Alps Electric Co., Ltd.
- 当前专利权人地址： JP Tokyo
- 代理机构： Brinks Hofer Gilson & Lione
- 优先权： JP2004-295677 20041008
- 主分类号： H03H9/125
- IPC分类号： H03H9/125
摘要：
A surface acoustic wave element having power resistance is provided. In the surface acoustic wave element, upper dispersion preventing layers and side dispersion preventing layers each made of metal nitride are provided between interdigital transducer electrode portions and an insulating layer. Further, lower dispersion preventing layers made of metal nitride are provided between the interdigital transducer electrode portions and a piezoelectric substrate. If dispersion preventing layers made of ‘metal nitride’ are provided between the interdigital transducer electrode portions and the insulating layer, even though the insulating layer is formed, it is possible to prevent voids from being generated in the interdigital transducer electrode portions, unlike a related art. Therefore, the power resistance can be improved.