Adamantane derivates which can be material compounds of a polymer excellent in etching resistance and having improved transmittance to light having a short wavelength, are produced by an economically advantageous process from readily available materials.A compound (10) is subjected to esterification reaction with a compound (11) to obtain a compound (12), which is subjected to fluorination in a liquid phase to obtain a compound (13), which is then subjected to hydrolysis or alcoholysis to obtain a compound (2), which is then reacted with a compound (15) thereby to obtain a compound (1). Here, A to J are —CFH— or —CF2—; RF is a perfluoroalkyl group or the like; X10 is F or the like; Y2 is H or OH; Y3 is H or RFCOO—; Y4 is H, F or RFCOO—; Y5 is H, F, RFCOO— or OH; Y0 is H, F, —OCOCR1═CH2 or OH: R1 is a hydrogen atom, a methyl group or the like; and X11 is OH or a halogen atom: