Invention Grant
- Patent Title: Pre-oxidization of deformable elements of microstructures
- Patent Title (中): 微观组织可变形元素的预氧化
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Application No.: US10766776Application Date: 2004-01-27
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Publication No.: US07514012B2Publication Date: 2009-04-07
- Inventor: Jonathan Doan , Satyadev R. Patel , Dmitri Simonian
- Applicant: Jonathan Doan , Satyadev R. Patel , Dmitri Simonian
- Applicant Address: US TX Dallas
- Assignee: Texas Instruments Incorporated
- Current Assignee: Texas Instruments Incorporated
- Current Assignee Address: US TX Dallas
- Agent Wade James Brady, III; Frederick J. Telecky, Jr.
- Main IPC: C23F1/00
- IPC: C23F1/00 ; H01L21/00
Abstract:
The present invention discloses a method for processing a deformable element of a microstructure for reducing the plastic deformation by oxidizing the deformable element. The method of the present invention can be performed at a variety of stages of the fabrication and packaging processes.
Public/Granted literature
- US20050161432A1 Pre-oxidization of deformable elements of microstructures Public/Granted day:2005-07-28
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