发明授权
US07517060B2 Fluid-ejection devices and a deposition method for layers thereof 有权
流体喷射装置及其层的沉积方法

Fluid-ejection devices and a deposition method for layers thereof
摘要:
A cavitation structure for a print head has a first dielectric layer overlying at least a first portion of a substrate. A second dielectric layer has a first portion overlying at least a second portion of the substrate and a second portion, different from the first portion of the second dielectric layer, overlying at least a portion of the first dielectric layer. A cavitation layer has a first portion in contact with the first dielectric layer and a second portion in lateral contact with the second portion of the second dielectric layer. A third dielectric layer is disposed on only the first portion of the second dielectric layer.
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