发明授权
- 专利标题: Apparatus for substrate handling
- 专利标题(中): 基板处理装置
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申请号: US10643424申请日: 2003-08-19
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公开(公告)号: US07517498B2公开(公告)日: 2009-04-14
- 发明人: Joseph P. Fredrick
- 申请人: Joseph P. Fredrick
- 申请人地址: US CA Santa Clara
- 专利权人: Agilent Technologies, Inc.
- 当前专利权人: Agilent Technologies, Inc.
- 当前专利权人地址: US CA Santa Clara
- 主分类号: B01L3/00
- IPC分类号: B01L3/00
摘要:
Devices, apparatus and methods are disclosed for carrying out processing steps involved in chemical reactions such as hybridization reactions conducted on the surface of a substrate comprising chemical compounds such as biopolymer features. A device comprises a housing comprising a housing chamber. The housing comprises an opening through which a substrate may be inserted into the housing chamber. The device may also comprise a lift mechanism for moving the substrate in and out of the housing chamber in a controlled manner. At least one inlet may be in fluid communication with the housing chamber and at least one outlet may be in fluid communication with the housing chamber. Also disclosed are methods wherein the surface is brought into contact with a processing fluid; and, then, the surface is removed from contact with the fluid in a controlled manner at a rate that substantially eliminates droplet formation of the fluid on the surface of the substrate.
公开/授权文献
- US20050042768A1 Apparatus for substrate handling 公开/授权日:2005-02-24