发明授权
US07517714B2 Image sensors for reducing dark current and methods of fabricating the same
有权
用于减少暗电流的图像传感器及其制造方法
- 专利标题: Image sensors for reducing dark current and methods of fabricating the same
- 专利标题(中): 用于减少暗电流的图像传感器及其制造方法
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申请号: US11839015申请日: 2007-08-15
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公开(公告)号: US07517714B2公开(公告)日: 2009-04-14
- 发明人: Chan Park , Jong-cheol Shin
- 申请人: Chan Park , Jong-cheol Shin
- 申请人地址: KR Suwon-si, Gyeonggi-do
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人地址: KR Suwon-si, Gyeonggi-do
- 代理机构: Volentine & Whitt, PLLC
- 优先权: KR10-2004-0040900 20040604; KR10-2004-0089255 20041104; KR10-2004-0090444 20041108
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
An image sensor includes a semiconductor substrate of a first conductivity type, a photodiode of a second conductivity type located in the substrate, a hole accumulated device (HAD) region of the first conductivity type located over the photodiode, a thin surface diffusion region formed on the surface of the HAD region, and a transfer gate located over the surface of the substrate adjacent the HAD region. The image sensor further includes a first channel region of the first conductivity type located in the substrate and aligned below the transfer gate, a second channel region of the second conductivity type located in the substrate between said transfer gate and the first channel region, and an floating diffusion region which is located in the substrate and which electrically contacts the second channel region.
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