发明授权
US07518718B2 High throughput inspection system and a method for generating transmitted and/or reflected images
有权
高通量检测系统和用于产生透射和/或反射图像的方法
- 专利标题: High throughput inspection system and a method for generating transmitted and/or reflected images
- 专利标题(中): 高通量检测系统和用于产生透射和/或反射图像的方法
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申请号: US11425101申请日: 2006-06-19
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公开(公告)号: US07518718B2公开(公告)日: 2009-04-14
- 发明人: Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
- 申请人: Emanuel Elyasaf , Haim Feldman , Simon Yalov , Eitan Lahat
- 申请人地址: IL Rehovot
- 专利权人: Applied Materials, Israel, Ltd.
- 当前专利权人: Applied Materials, Israel, Ltd.
- 当前专利权人地址: IL Rehovot
- 代理商 Tarek N. Fahmi
- 主分类号: G01N21/88
- IPC分类号: G01N21/88
摘要:
Inspection system and method for high-throughput inspection, the system and method is capable to generate and sense transmitted and/or reflected short duration beams. According to one embodiment of the invention the transmitted and reflected short duration beams are generated and sensed simultaneously thus provide a reflected image and a transmitted image simultaneously. The reflected and transmitted short duration radiation beams are manipulated either in the frequency domain or are distinctly polarized such that they are directed to the appropriate area sensors. According to another aspect of the invention the system changes the manipulation of a short duration beam of radiation to selectively direct the short duration beam to distinct area sensors.
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