发明授权
- 专利标题: Optical deflector and optical instrument using the same
- 专利标题(中): 光学偏转器和光学仪器使用相同
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申请号: US12146561申请日: 2008-06-26
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公开(公告)号: US07518774B2公开(公告)日: 2009-04-14
- 发明人: Takahisa Kato , Kazutoshi Torashima , Yukio Furukawa , Yasuhiro Shimada
- 申请人: Takahisa Kato , Kazutoshi Torashima , Yukio Furukawa , Yasuhiro Shimada
- 申请人地址: JP Tokyo
- 专利权人: Canon Kabushiki Kaisha
- 当前专利权人: Canon Kabushiki Kaisha
- 当前专利权人地址: JP Tokyo
- 代理机构: Fitzpatrick, Cella, Harper & Scinto
- 优先权: JP2006-149940 20060530
- 主分类号: G02B26/08
- IPC分类号: G02B26/08
摘要:
An optical deflector includes an oscillating system and a driving system for driving the oscillating system, the oscillating system including a first oscillator, a first torsion spring, a second oscillator, a second torsion spring and a supporting member, the first oscillator including a first movable element having a light deflecting element configured to deflect light, the second oscillator including a second movable element having a mass adjusting member configured to adjust a mass, wherein the first movable element is resiliently supported by the second movable element through the first torsion spring, for torsional oscillation about an oscillation axis, wherein the second movable element is resiliently supported by the supporting member through the second torsional spring, for torsional oscillation about the oscillation axis, and wherein the oscillating system has at least two natural oscillation modes having different frequencies, about the oscillation axis.
公开/授权文献
- US20080266632A1 OPTICAL DEFLECTOR AND OPTICAL INSTRUMENT USING THE SAME 公开/授权日:2008-10-30
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