发明授权
- 专利标题： Method and apparatus for manufacturing display
- 专利标题（中）： 制造显示器的方法和装置
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申请号： US11208608申请日： 2005-08-23
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公开(公告)号： US07521268B2公开(公告)日： 2009-04-21
- 发明人: Motonobu Aoki , Tetsuo Ishida
- 申请人： Motonobu Aoki , Tetsuo Ishida
- 申请人地址： JP Tokyo
- 专利权人： Toshiba Matsushita Display Technology Co., Ltd.
- 当前专利权人： Toshiba Matsushita Display Technology Co., Ltd.
- 当前专利权人地址： JP Tokyo
- 代理机构： Oblon, Spivak, McClelland, Maier & Neustadt, P.C.
- 优先权： JP2004-267021 20040914
- 主分类号： H01L21/00
- IPC分类号： H01L21/00
摘要：
Provided is a method of manufacturing a display which includes an insulating substrate and a structure formed on the insulating substrate and including a display element, including forming a patterned layer as a portion of the structure on the insulating substrate by vapor deposition in vacuum using a mask, and cooling the insulating substrate before and/or during formation of the patterned layer by arranging a cooling plate which comprises a metal substrate and an infrared absorption layer covering a main surface of the metal substrate and being larger in infrared absorptance than the metal plate such that the infrared absorption layer faces the insulating substrate.
公开/授权文献
- US20060057750A1 Method and apparatus for manufacturing display 公开/授权日：2006-03-16
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